11/15/2011	2:37:19 PM	Main Vac valve closed
11/15/2011	2:37:28 PM	Helium MFC set to  500.000000
11/15/2011	2:37:31 PM	Helium valve opened
11/15/2011	2:37:48 PM	BCl3 MFC set to  100.000000
11/15/2011	2:38:11 PM	BCl3 valve opened
11/15/2011	2:38:37 PM	Bubbler valve opened
11/15/2011	2:47:38 PM	BCl3 valve closed
11/15/2011	2:47:42 PM	Bubbler valve closed
11/15/2011	2:47:43 PM	Helium valve closed
11/15/2011	2:47:49 PM	Bypass valve opened
11/15/2011	2:48:05 PM	BCl3 MFC set to  100.000000
11/15/2011	2:48:11 PM	BCl3 valve opened
11/15/2011	2:48:18 PM	Helium MFC set to  0.000000
11/15/2011	2:48:59 PM	Helium MFC set to  500.000000
11/15/2011	2:50:18 PM	Bypass valve closed
11/15/2011	2:50:20 PM	BCl3 valve closed
11/15/2011	2:50:21 PM	Helium valve opened
11/15/2011	2:51:08 PM	Helium valve closed
11/15/2011	2:51:13 PM	BCl3 valve opened
11/15/2011	2:51:30 PM	Bypass valve opened
11/15/2011	2:55:14 PM	BCl3 valve closed
11/15/2011	2:55:14 PM	BCl3 valve opened
11/15/2011	2:55:14 PM	BCl3 valve closed
11/15/2011	2:55:24 PM	Bypass valve closed
11/15/2011	2:55:25 PM	Helium valve opened
11/15/2011	2:56:32 PM	Helium valve closed
11/15/2011	2:56:33 PM	BCl3 valve opened
11/15/2011	2:56:52 PM	Bypass valve opened
11/15/2011	3:02:34 PM	BCl3 valve closed
11/15/2011	3:02:35 PM	Bypass valve closed
11/15/2011	3:02:37 PM	Helium valve opened
11/15/2011	3:03:47 PM	Helium valve closed
11/15/2011	3:03:51 PM	BCl3 valve opened
11/15/2011	3:04:00 PM	BCl3 valve closed
11/15/2011	3:04:01 PM	Helium valve opened
11/15/2011	3:04:05 PM	Helium valve closed
11/15/2011	3:04:07 PM	BCl3 valve opened
11/15/2011	3:04:11 PM	Bypass valve opened
11/15/2011	3:07:36 PM	Bypass valve closed
11/15/2011	3:07:37 PM	BCl3 valve closed
11/15/2011	3:07:38 PM	Helium valve opened
11/15/2011	3:08:49 PM	Helium valve closed
11/15/2011	3:08:50 PM	BCl3 valve opened
11/15/2011	3:08:57 PM	BCl3 valve closed
11/15/2011	3:08:58 PM	Helium valve opened
11/15/2011	3:09:03 PM	Helium valve closed
11/15/2011	3:09:04 PM	BCl3 valve opened
11/15/2011	3:09:16 PM	BCl3 valve closed
11/15/2011	3:23:30 PM	Program exited cleanly
11/15/2011	3:53:14 PM	Helium valve closed
11/15/2011	3:53:14 PM	H2 valve closed
11/15/2011	3:53:14 PM	BCl3 valve closed
11/15/2011	3:53:14 PM	PH3 valve closed
11/15/2011	3:53:14 PM	SiCl4 pre valve closed
11/15/2011	3:53:14 PM	SiCl4 post valve closed
11/15/2011	3:53:14 PM	Main Vac valve closed
11/15/2011	3:53:14 PM	Bypass valve closed
11/15/2011	3:53:14 PM	Bubbler valve closed
11/15/2011	3:53:14 PM	Helium MFC set to  0.000000
11/15/2011	3:53:14 PM	H2 MFC set to  0.000000
11/15/2011	3:53:14 PM	BCl3 MFC set to  0.000000
11/15/2011	3:53:14 PM	PHl3 MFC set to  0.000000
11/15/2011	3:53:14 PM	SiCl4 MFC set to  0.000000
11/15/2011	3:53:14 PM	Bypass solenoid MFC set to  760.000000
11/15/2011	3:53:14 PM	Tube furnace set to 0
11/15/2011	3:53:20 PM	BCl3 valve opened
11/15/2011	3:53:27 PM	BCl3 MFC set to  20.000000
11/15/2011	3:53:36 PM	Bypass valve opened
11/15/2011	4:18:52 PM	Bypass valve closed
11/15/2011	4:18:52 PM	Main Vac valve opened
11/15/2011	4:18:59 PM	Program exited cleanly
11/15/2011	5:09:57 PM	Helium valve closed
11/15/2011	5:09:57 PM	H2 valve closed
11/15/2011	5:09:57 PM	BCl3 valve closed
11/15/2011	5:09:57 PM	PH3 valve closed
11/15/2011	5:09:57 PM	SiCl4 pre valve closed
11/15/2011	5:09:57 PM	SiCl4 post valve closed
11/15/2011	5:09:57 PM	Main Vac valve closed
11/15/2011	5:09:57 PM	Bypass valve closed
11/15/2011	5:09:57 PM	Bubbler valve closed
11/15/2011	5:09:57 PM	Helium MFC set to  0.000000
11/15/2011	5:09:57 PM	H2 MFC set to  0.000000
11/15/2011	5:09:57 PM	BCl3 MFC set to  0.000000
11/15/2011	5:09:57 PM	PHl3 MFC set to  0.000000
11/15/2011	5:09:57 PM	SiCl4 MFC set to  0.000000
11/15/2011	5:09:57 PM	Bypass solenoid MFC set to  760.000000
11/15/2011	5:09:58 PM	Tube furnace set to 0
11/15/2011	5:10:05 PM	Helium MFC set to  500.000000
11/15/2011	5:10:06 PM	Helium valve opened
11/15/2011	5:11:12 PM	Helium valve closed
11/15/2011	5:11:16 PM	BCl3 MFC set to  20.000000
11/15/2011	5:11:18 PM	Helium valve opened
11/15/2011	5:11:20 PM	BCl3 valve opened
11/15/2011	5:11:23 PM	Helium valve closed
11/15/2011	5:11:37 PM	Helium valve opened
11/15/2011	5:11:44 PM	Helium valve closed
11/15/2011	5:12:03 PM	Helium valve opened
11/15/2011	5:12:06 PM	Helium valve closed
11/15/2011	5:12:09 PM	Bypass valve opened
11/15/2011	5:14:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/15/2011	5:14:26 PM	Recipe started at 5:14 PM
11/15/2011	5:14:26 PM	Helium valve closed
11/15/2011	5:14:26 PM	H2 valve closed
11/15/2011	5:14:26 PM	BCl3 valve closed
11/15/2011	5:14:26 PM	PH3 valve closed
11/15/2011	5:14:26 PM	SiCl4 pre valve closed
11/15/2011	5:14:26 PM	SiCl4 post valve closed
11/15/2011	5:14:26 PM	Main Vac valve closed
11/15/2011	5:14:26 PM	Bypass valve closed
11/15/2011	5:14:26 PM	Bubbler valve closed
11/15/2011	5:14:26 PM	Helium MFC set to  0.000000
11/15/2011	5:14:26 PM	H2 MFC set to  0.000000
11/15/2011	5:14:26 PM	BCl3 MFC set to  0.000000
11/15/2011	5:14:26 PM	PHl3 MFC set to  0.000000
11/15/2011	5:14:26 PM	SiCl4 MFC set to  0.000000
11/15/2011	5:14:26 PM	Bypass solenoid MFC set to  0.000000
11/15/2011	5:14:26 PM	Tube furnace set to 0
11/15/2011	5:14:26 PM	Run finished at 5:14 PM
11/15/2011	5:14:26 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
11/15/2011	5:14:30 PM	Program exited cleanly
11/15/2011	5:14:48 PM	Helium valve closed
11/15/2011	5:14:48 PM	H2 valve closed
11/15/2011	5:14:48 PM	BCl3 valve closed
11/15/2011	5:14:48 PM	PH3 valve closed
11/15/2011	5:14:48 PM	SiCl4 pre valve closed
11/15/2011	5:14:48 PM	SiCl4 post valve closed
11/15/2011	5:14:48 PM	Main Vac valve closed
11/15/2011	5:14:48 PM	Bypass valve closed
11/15/2011	5:14:48 PM	Bubbler valve closed
11/15/2011	5:14:48 PM	Helium MFC set to  0.000000
11/15/2011	5:14:48 PM	H2 MFC set to  0.000000
11/15/2011	5:14:48 PM	BCl3 MFC set to  0.000000
11/15/2011	5:14:48 PM	PHl3 MFC set to  0.000000
11/15/2011	5:14:48 PM	SiCl4 MFC set to  0.000000
11/15/2011	5:14:48 PM	Bypass solenoid MFC set to  760.000000
11/15/2011	5:14:48 PM	Tube furnace set to 0
11/15/2011	5:14:51 PM	BCl3 valve opened
11/15/2011	5:14:54 PM	BCl3 MFC set to  20.000000
11/15/2011	5:14:55 PM	Bypass valve opened
11/15/2011	5:17:47 PM	Bypass valve closed
11/15/2011	5:17:48 PM	Main Vac valve opened
11/15/2011	5:50:55 PM	BCl3 valve closed
11/15/2011	5:50:56 PM	Main Vac valve closed
11/15/2011	5:51:06 PM	H2 MFC set to  500.000000
11/15/2011	5:51:07 PM	H2 valve opened
11/15/2011	5:52:17 PM	Bypass valve opened
11/15/2011	5:52:18 PM	Bypass valve closed
11/15/2011	5:52:49 PM	H2 valve closed
11/15/2011	5:52:49 PM	BCl3 valve opened
11/15/2011	5:53:04 PM	BCl3 valve closed
11/15/2011	5:53:04 PM	H2 valve opened
11/15/2011	5:53:11 PM	H2 valve closed
11/15/2011	5:53:11 PM	BCl3 valve opened
11/15/2011	5:53:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2011	5:53:34 PM	Recipe started at 5:53 PM
11/15/2011	5:53:34 PM	Helium valve closed
11/15/2011	5:53:34 PM	H2 valve closed
11/15/2011	5:53:34 PM	BCl3 valve closed
11/15/2011	5:53:34 PM	PH3 valve closed
11/15/2011	5:53:34 PM	SiCl4 pre valve closed
11/15/2011	5:53:34 PM	SiCl4 post valve closed
11/15/2011	5:53:34 PM	Main Vac valve closed
11/15/2011	5:53:34 PM	Bubbler valve closed
11/15/2011	5:53:34 PM	Bypass valve opened
11/15/2011	5:53:34 PM	Helium MFC set to  0.000000
11/15/2011	5:53:34 PM	H2 MFC set to  0.000000
11/15/2011	5:53:34 PM	BCl3 MFC set to  0.000000
11/15/2011	5:53:34 PM	PHl3 MFC set to  0.000000
11/15/2011	5:53:34 PM	SiCl4 MFC set to  0.000000
11/15/2011	5:53:34 PM	Bypass solenoid MFC set to  0.000000
11/15/2011	5:53:34 PM	Tube furnace set to 0
11/15/2011	5:53:40 PM	Run aborted at 5:53 PM
11/15/2011	5:53:40 PM	Helium valve closed
11/15/2011	5:53:40 PM	H2 valve closed
11/15/2011	5:53:40 PM	BCl3 valve closed
11/15/2011	5:53:40 PM	PH3 valve closed
11/15/2011	5:53:40 PM	SiCl4 pre valve closed
11/15/2011	5:53:40 PM	SiCl4 post valve closed
11/15/2011	5:53:40 PM	Bypass valve closed
11/15/2011	5:53:40 PM	Main Vac valve closed
11/15/2011	5:53:40 PM	Bubbler valve closed
11/15/2011	5:53:40 PM	Helium MFC set to  0.000000
11/15/2011	5:53:40 PM	H2 MFC set to  0.000000
11/15/2011	5:53:40 PM	BCl3 MFC set to  0.000000
11/15/2011	5:53:40 PM	PHl3 MFC set to  0.000000
11/15/2011	5:53:40 PM	SiCl4 MFC set to  0.000000
11/15/2011	5:53:40 PM	Tube furnace set to 0
11/15/2011	5:53:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/15/2011	5:53:46 PM	BCl3 MFC set to  20.000000
11/15/2011	5:53:47 PM	BCl3 valve opened
11/15/2011	5:53:50 PM	Bypass valve opened
11/15/2011	5:57:38 PM	Bypass valve closed
11/15/2011	5:57:38 PM	Main Vac valve opened
11/15/2011	7:00:59 PM	Main Vac valve closed
11/15/2011	7:01:00 PM	BCl3 valve closed
11/15/2011	7:01:05 PM	H2 MFC set to  500.000000
11/15/2011	7:01:05 PM	H2 valve opened
11/15/2011	7:02:17 PM	H2 valve closed
11/15/2011	7:02:18 PM	BCl3 valve opened
11/15/2011	7:02:37 PM	BCl3 valve closed
11/15/2011	7:02:38 PM	H2 valve opened
11/15/2011	7:02:47 PM	H2 valve closed
11/15/2011	7:02:48 PM	BCl3 valve opened
11/15/2011	7:03:04 PM	Bypass valve opened
11/15/2011	7:05:47 PM	Bypass valve closed
11/15/2011	7:05:48 PM	Main Vac valve opened
11/15/2011	7:28:03 PM	Main Vac valve closed
11/15/2011	7:28:04 PM	BCl3 valve closed
11/15/2011	7:28:05 PM	H2 valve opened
11/15/2011	7:29:20 PM	H2 valve closed
11/15/2011	7:29:20 PM	BCl3 valve opened
11/15/2011	7:29:46 PM	BCl3 valve closed
11/15/2011	7:29:47 PM	H2 valve opened
11/15/2011	7:29:54 PM	H2 valve closed
11/15/2011	7:29:55 PM	BCl3 valve opened
11/15/2011	7:30:08 PM	Bypass valve opened
11/15/2011	7:45:48 PM	Bypass valve closed
11/15/2011	7:45:49 PM	Main Vac valve opened
11/15/2011	8:02:30 PM	Main Vac valve closed
11/15/2011	8:02:39 PM	Main Vac valve opened
11/15/2011	8:38:26 PM	Main Vac valve closed
11/15/2011	8:38:34 PM	Main Vac valve opened
11/15/2011	9:16:43 PM	Main Vac valve closed
11/15/2011	9:16:50 PM	Main Vac valve opened
11/15/2011	10:47:01 PM	Main Vac valve closed
11/15/2011	10:48:12 PM	Main Vac valve opened
11/15/2011	11:31:22 PM	Main Vac valve closed
11/15/2011	11:31:31 PM	Main Vac valve opened
